High Vacuum Valves

・Aluminum bodied
　Uniform baking temperature
　Lightweight, Compact
　Minimal outgassing
　Minimal contamination from heavy metals
・Bellows are replaceable.

・Improved durability of bellows (Flange sizes 100 and 160)
・Service life of two million cycles
・Space required for equipment can be reduced
　Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa)
　Increased flexibility of mounting orientation
・Lightweight, Compact

・High fluorine resistance
・Minimal outgassing
・Minimal contamination from heavy metals

∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
　discontinued in September 2017.
　Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.

・One-touch connection and release (No tools are required.)

・The precision casting, unified composition prevents the accumulation of gas.
・The XM series is interchangeable with the XL series aluminum high vacuum angle valve.

Note) Size 16 is not available for the in-line type.

・Minimum operating pressure: 1 × 10-6 Pa (abs)
・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s
・2 types of fittings and female threads are available.
・Power consumption: Max. 25% reduction
・Weight: Max. 18% lighter (0.5 kg → 0.41 kg)

・The valve/needle valve-integrated construction requires only 1/4 the piping space of previous models.
・Particle numbers have been significantly reduced through the use of a metal diaphragm in the sheet portion.
・Flow of both the initial air supply and the main air supply can be adjusted.